Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies

Authors:	Le, Van Ngoc Tran, Cao Vinh Le, Quang Toai Nguyen, Duc Thinh Huynh, Thanh Dat
Keywords:	WO3 structure;WO3 /ITO/glass;Raman spectroscopy
Issue Date:	2009
Publisher:	H. : ĐHQGHN
Series/Report no.:	Vol. 25;No. 1 (2009)
Abstract:	Tungsten oxide film was deposited on ITO-coated glass by using RF magnetron sputtering method from WO3 ceramic target. Thin film preparation – process took place in Ar + O2 plasma. The dependence of tungsten oxide film structure on experiment conditions was investigated by X-ray diffraction (XRD) Raman spectroscopy. In this paper, we considered that the thickness of ITO layers about 150nm to 350nm clearly effects on the Raman and XRD spectrograms of WO3 films.
Description:	p. 47-55
URI:	http://repository.vnu.edu.vn/handle/VNU_123/56812
ISSN:	2588-1124
Appears in Collections:	Mathematics and Physics